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Reduction of background due to backscattered electrons in energy‐dispersive X‐ray microanalysis
Author(s) -
Hall T. A.
Publication year - 1977
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1977.tb00020.x
Subject(s) - microanalysis , x ray , electron , electron probe microanalysis , reduction (mathematics) , materials science , energy (signal processing) , optics , physics , analytical chemistry (journal) , chemistry , scanning electron microscope , nuclear physics , chromatography , mathematics , organic chemistry , quantum mechanics , geometry
SUMMARY When energy‐dispersive X‐ray microanalysis is practised in a scanning electron microscope, most of the spectral background may come from electrons entering the detector. This background can be eliminated by deflecting magnets. Alternatively, the electrons can be blocked by a plastic film but only at the cost of suppression of the low‐energy end of the X‐ray spectrum.

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