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The use of moiré patterns to determine the source and degree of adistortion in scanning electron microscopes
Author(s) -
Bradley S. A.,
Thielen P. N.,
Hilliard J. E.
Publication year - 1975
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1975.tb04534.x
Subject(s) - moiré pattern , distortion (music) , optics , scanning electron microscope , cathode ray tube , microscope , electron microscope , cathode , materials science , measure (data warehouse) , physics , computer science , optoelectronics , chemistry , data mining , amplifier , cmos
SUMMARY Scanning electron microscope images are subject to an appreciable amount of non‐linear distortion which must be allowed for when quantitative analyses are made. A method is described for measuring the distortion by the use of moiré patterns. These greatly magnify any non‐linearities and it is possible to measure distortions as small as 0ṁ1%. In addition, the use of moiré patterns permits a separation of the distortion produced in the cathode‐ray display tube from that occurring in the microscope itself.