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A digital modification for beam current measurements in electron microscopy
Author(s) -
Johansen B. V.
Publication year - 1974
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1974.tb03960.x
Subject(s) - current (fluid) , beam (structure) , cathode ray , materials science , electron beam induced current , electron microscope , microscopy , sensitivity (control systems) , optics , transmission electron microscopy , optoelectronics , electron , physics , nanotechnology , electronic engineering , silicon , engineering , nuclear physics , thermodynamics
SUMMARY A digital microammeter with 0.1 μA sensitivity has been employed in the TEM beam current circuit to increase the accuracy to which the electron beam can be recorded and adjusted.