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Sol‐Gel Alumina Coating for Improved Cyclic Oxidation Resistance of Silicon Nitride
Author(s) -
Tsarenko Irina,
Park Sang,
Du Honghua,
Lee Woo Y.
Publication year - 2003
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.2003.tb03528.x
Subject(s) - silicon nitride , materials science , layer (electronics) , nitride , sol gel , silicon , coating , oxide , silicon oxide , locos , nanometre , grain size , chemical engineering , composite material , metallurgy , nanotechnology , engineering
A 25 nm thick α‐alumina layer was deposited on a turbine‐grade silicon nitride by sol‐gel dip coating and subsequent heat treatment in air at 1200°C. This layer had a nanometer grain structure. Silicon nitride protected by this thin layer showed a significant improvement in oxidation resistance over its uncoated counterpart after 200 cyclic exposures in air at 1250°C. The oxide layer grown on the coated silicon nitride also exhibited superior surface morphology, compared with the uncoated silicon nitride.