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Preparation of Lead Zirconate Titanate Thin Films Derived by Hybrid Processing: Sol‐Gel Method and Laser Ablation
Author(s) -
Wang Zhan Jie,
Karibe Isao,
Maeda Ryutaro,
Kokawa Hiroyuki
Publication year - 2002
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.2002.tb00592.x
Subject(s) - materials science , thin film , scanning electron microscope , sol gel , lead zirconate titanate , annealing (glass) , laser ablation , ferroelectricity , dielectric , microstructure , zirconate , composite material , analytical chemistry (journal) , titanate , laser , optoelectronics , nanotechnology , optics , ceramic , chemistry , physics , chromatography
Thin films of Pb(Zr 0.52 Ti 0.48 )O 3 (PZT) were prepared by hybrid processing (sol‐gel and excimer laser ablation) on Pt/Ti/SiO 2 /Si substrates. Crystalline phases and microstructures of the PZT films were investigated by X‐ray diffraction analysis and scanning electron microscopy, respectively. Electrical properties of the films were evaluated by measuring their P ‐ E hysteresis loops and dielectric constants. The temperature of postdeposition annealing in hybrid processing was lower than that in the case of direct film deposition by laser ablation on a Pt/Ti/SiO 2 /Si substrate. The preferred orientation of the films derived by hybrid processing could be controlled using the seeding layer deposited by the sol‐gel process. The films fabricated by hybrid processing consisted of the perovskite phase with a (111) preferred orientation and had good ferroelectric properties.