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Effects of Coffee‐Bean‐Like Morphology and Graded Interlayer on Texture Evolution of Plasma‐Enhanced Chemical‐Vapor‐Deposited Ti‐C‐N Films
Author(s) -
Shieh Jiann,
Wang Hsiao Lei,
Tsai Ming Shyong,
Hon Min Hsiung
Publication year - 2002
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.2002.tb00143.x
Subject(s) - tin , chemical vapor deposition , materials science , titanium nitride , texture (cosmology) , titanium , titanium carbide , coating , layer (electronics) , carbide , nitride , morphology (biology) , composite material , metallurgy , chemical engineering , nanotechnology , image (mathematics) , artificial intelligence , biology , computer science , genetics , engineering
Titanium nitride (TiN), titanium carbide (TiC), and titanium carbonitride (TiC x N 1−x ) were prepared by plasma‐enhanced chemical vapor deposition. A graded interlayer was introduced to explore its effects on the texture of the TiC and TiN. The results showed that the topography of the TiC x N 1−x , which resembled coffee beans, resulted from a twinning core structure that caused the dendritic grain shape and enhanced the 〈211〉 texture of TiC 0.62 ·N 0.38 and TiC 0.75 ·N 0.25 . As graded coating was used as a transition layer, the texture of TiC was changed from (220) to (200), and TiN was changed from (200) to (220) due to the pseudomorphic forces provided by the first layer plus graded layer. The residual stress contributions to this phenomenon are also discussed.