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Self‐Mending of Microcracks in Barium Titanate Glass‐Ceramic Thin Films with High Dielectric Constant
Author(s) -
Yao Kui,
Tay Francis Eng Hock,
Zhu Weiguang
Publication year - 2002
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.2002.tb00121.x
Subject(s) - materials science , dielectric , composite material , ceramic , barium titanate , annealing (glass) , thin film , permittivity , glass ceramic , nanometre , dielectric loss , high κ dielectric , sol gel , nanotechnology , optoelectronics
BaTiO 3 glass‐ceramic thin films were deposited on silicon substrates by the sol–gel method. The films exhibited a mixed structure of glass phase and BaTiO 3 grains tens of nanometers in diameter, and had a high dielectric constant, low leakage current, and dielectric loss. An interesting self‐mending phenomenon for microcracks due to the fluidity of the glass phase during the annealing process was observed in the films. The effects of the existence of the self‐mended microcracks on electrical properties were evaluated. Our experimental results indicate the potential value of BaTiO 3 glass‐ceramic thin films for integrated high‐dielectric‐constant media.