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Rapid Preparation of Lead Titanate Sputtering Target Using Spark‐Plasma Sintering
Author(s) -
Takeuchi Tomonari,
Takahashi Masao,
Ado Kazuaki,
Tamari Nobuyuki,
Ichikawa Kiyoshi,
Miyamoto Shinichi,
Kawahara Masakazu,
Tabuchi Mitsuharu,
Kageyama Hiroyuki
Publication year - 2001
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.2001.tb01046.x
Subject(s) - spark plasma sintering , materials science , sputtering , ceramic , sintering , particle (ecology) , lead titanate , relative density , particle size distribution , plasma , particle size , composite material , mineralogy , analytical chemistry (journal) , chemical engineering , thin film , nanotechnology , ferroelectricity , dielectric , chemistry , optoelectronics , chromatography , oceanography , physics , quantum mechanics , geology , engineering
PbTiO 3 sputtering targets 8 cm in diameter were prepared using spark‐plasma sintering (SPS) for relatively short periods, ∼2 min. Submicrometer‐sized PbTiO 3 powders with a relatively large size distribution were densified to ∼86% of the theoretical X‐ray density using the SPS process. In contrast, large‐sized (8 cm in diameter) ceramics could not be prepared from starting powders with a relatively narrow particle‐size distribution. Formation of cracks in the large PbTiO 3 targets was observed when samples were prepared under higher pressures (>50 MPa) or at higher temperatures (>900°C). Crack formation was attributed to unrelaxed internal stress originating from lower pore contents and from an inhomogeneous distribution of cations in the ceramics prepared under these conditions.