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Constrained Film Sintering of Nanocrystalline TiO 2
Author(s) -
Stech Martin,
Reynders Peter,
Rödel Jürgen
Publication year - 2000
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.2000.tb01487.x
Subject(s) - sintering , nanocrystalline material , materials science , grain size , grain growth , particle size distribution , composite material , chemical engineering , particle size , nanotechnology , engineering
The sintering of thin, nanocrystalline TiO 2 films either 140 or 65 nm thick is characterized and compared with the sintering of bulk material. Grain size, pore size distribution, and density data are obtained. Observation of the microstructural evolution during sintering suggests that grain growth, as well as pore growth, at low density can be attributed to differential sintering. A continuum mechanical model for the intermediate stage is useful until the grain size becomes one‐half the film thickness. From then on, the ratio of grain size to film thickness affects the degree by which both densification and grain growth decrease, as compared with the continuum computation results.