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Scanning Electron‐Beam Dielectric Microscopy for the Investigation of the Temperature Coefficient Distribution of Dielectric Ceramics
Author(s) -
Cho Yasuo,
Jintsugawa Osamu,
Yamanouchi Kazuhiko
Publication year - 2000
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.2000.tb01375.x
Subject(s) - dielectric , materials science , scanning electron microscope , microscopy , ceramic , optical microscope , optics , temperature coefficient , electron microprobe , photothermal therapy , analytical chemistry (journal) , composite material , optoelectronics , nanotechnology , chemistry , physics , chromatography , metallurgy
Studies on scanning electron‐beam dielectric microscopy are reported. This microscopy technique is used for determining the temperature coefficient distribution of dielectric materials using an electron beam as a heat source instead of a light beam as in photothermal dielectric microscopy. This microscopy technique, which has the ability to simultaneously observe SEM images and the material composition by EPMA, has a resolution better than that of photothermal dielectric microscopy. To demonstrate the usefulness of this technique, the two‐dimensional image of a two‐phase composite ceramic composed of TiO 2 and Bi 2 Ti 4 O 11 is measured.