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Effect of Precursor Pyrolysis on the Dielectric Properties of Hydrothermally Derived Barium Titanate Thin Films
Author(s) -
McCormick Mark A.,
Slamovich Elliott B.
Publication year - 2000
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.2000.tb01216.x
Subject(s) - dielectric , materials science , thin film , barium titanate , pyrolysis , aqueous solution , chemical engineering , hydrothermal circulation , titanium , porosity , mineralogy , composite material , nanotechnology , metallurgy , chemistry , organic chemistry , optoelectronics , engineering
BaTiO 3 thin films were processed hydrothermally on Ag‐coated quartz substrates at 90°C by reacting films of titanium dimethoxy dineodecanoate (TDD) in aqueous solutions of Ba(OH) 2 . Two reaction sequences were used: either the TDD was reacted directly in aqueous Ba(OH) 2 , or the TDD was first pyrolyzed in air at temperatures ranging from 200° to 500°C before hydrothermal reaction. Depending on the processing conditions, the dielectric constant of the thin films ranged from 5 to 170, the dielectric constant increasing with increasing pyrolysis temperature. Thin film porosimetry data suggest that the improvement in film dielectric performance is related to decreases in thin film residual porosity after hydrothermal reaction.