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Improved Oxidation Resistance of Silicon Nitride by Aluminum Implantation: I, Kinetics and Oxide Characteristics
Author(s) -
Cheong Yong S.,
Mukundhan Priya,
Du Henry H.,
Withrow Stephen P.
Publication year - 2000
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.2000.tb01164.x
Subject(s) - activation energy , materials science , nitride , aluminium , kinetics , oxide , sodium , silicon nitride , silicon , oxygen , phase (matter) , chemical engineering , inorganic chemistry , mineralogy , analytical chemistry (journal) , metallurgy , layer (electronics) , chemistry , nanotechnology , quantum mechanics , engineering , chromatography , physics , organic chemistry
Hot‐isostatically‐pressed, additive‐free Si 3 N 4 ceramics were implanted with aluminum at multi‐energies and multidoses to achieve uniform implant concentrations at 1, 5, and 10 at.% to a depth of about 200 nm. The oxidation behavior of unimplanted and aluminum‐implanted Si 3 N 4 samples was investigated in 1 atm flowing oxygen entrained with 100 and 220 ppm NaNO 3 vapor at 900–1100°C. Unimplanted Si 3 N 4 exhibits a rapid, linear oxidation rate with an apparent activation energy of about 70 kJ/mol, independent of the sodium content in the gas phase. Oxides formed on the unimplanted samples are rough and are populated with cracks and pores. In contrast, aluminum‐implanted Si 3 N 4 shows a significantly reduced, parabolic oxidation rate with apparent activation energies in the range of 90–140 kJ/mol, depending on the sodium content as well as the implant concentration. The oxides formed on the implanted samples are glassy and mostly free from surface flaws. The alteration of the oxidation kinetics and mechanism of Si 3 N 4 in a sodium‐containing environment by aluminum implantation is a consequence of the effective modification of the properties of the sodium silicates through aluminum incorporation.