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Corrosion of Aluminum Nitride (AlN) in Aqueous Cleaning Solutions
Author(s) -
Svedberg Lynne M.,
Arndt Kenneth C.,
Cima Michael J.
Publication year - 2000
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.2000.tb01145.x
Subject(s) - corrosion , aqueous solution , nitride , materials science , barrier layer , layer (electronics) , aluminium , ammonia , inorganic chemistry , electrochemistry , chemical engineering , ammonium , electrode , metallurgy , chemistry , composite material , organic chemistry , engineering
The corrosion of aluminum nitride (AlN) in aqueous solutions has been evaluated in situ , using an ammonium/ammonia ion‐selective electrode. The corrosion behavior of AlN over a pH range of 5.5–12 indicates that the corrosion products that are formed act as a protective barrier layer in the pH regime where they have the lowest stability. An insoluble barrier layer is formed via the oxidation of the AlN surface in air at a temperature of 750°C for 10 min. This oxynitride layer, which is 200 Å thick, prevents the corrosion of the AlN in a pH 9.5 aqueous solution; however, the thermal conductivity is reduced by 6.6%.