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Crystallization and Microstructure Development of Sol–Gel‐Derived Titanium Dioxide Thin Films with Single and Multiple Layers
Author(s) -
Ohya Yutaka,
Mishina Jyunji,
Matsuda Tatsuya,
Ban Takayuki,
Takahashi Yasutaka
Publication year - 1999
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1999.tb02129.x
Subject(s) - anatase , rutile , materials science , microstructure , crystallization , equiaxed crystals , titanium dioxide , chemical engineering , grain size , thin film , titanium , deposition (geology) , grain growth , mineralogy , diethanolamine , metallurgy , nanotechnology , chemistry , photocatalysis , geology , catalysis , paleontology , sediment , engineering , biochemistry
Sol–gel TiO 2 thin films were fabricated at 650°C using sol that was derived from the Ti(O i Pr) 4 ‐diethanolamine‐H 2 O‐ i PrOH system. Repeated deposition and rapid heating resulted in columnar grains, whereas slow heating—at a rate of 10°–20°C/min—caused equiaxed grains to form. Slow heating caused the film to crystallize as anatase. The anatase‐to‐rutile ratio of the rapidly heated film increased with increased deposition thickness and repeated depositions. The tendency of the thicker film to crystallize as rutile during rapid heating was attributed to the rapid grain growth of fine anatase grains.