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Kinetics of Oxidization Processes of Ruthenium Particles
Author(s) -
Tanaka Masahiro,
Ami Miho
Publication year - 1998
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1998.tb02655.x
Subject(s) - ruthenium , thermogravimetric analysis , kinetics , diffusion , ruthenium oxide , chemical engineering , materials science , oxygen , layer (electronics) , chemistry , inorganic chemistry , nanotechnology , catalysis , organic chemistry , thermodynamics , physics , quantum mechanics , engineering
The oxidation of ruthenium using rapid thermal processing (RTP) was investigated by thermogravimetric analysis. Ruthenium single‐crystal particles with 10 µm diameter were used in the present study. The result showed that the early stage of RTP was controlled primarily by the oxygen diffusion process through the RuO 2 reacted layer.