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Preparation of Transparent Thick Films by Electrophoretic Sol‐Gel Deposition Using Phenyltriethoxysilane‐Derived Particles
Author(s) -
Katagiri Kiyofumi,
Hasegawa Koichi,
Matsuda Atsunori,
Tatsumisago Masahiro,
Minami Tsutomu
Publication year - 1998
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1998.tb02653.x
Subject(s) - electrophoretic deposition , scanning electron microscope , indium tin oxide , materials science , sol gel , electrophoresis , deposition (geology) , chemical engineering , thin film , composite material , chemistry , nanotechnology , chromatography , coating , paleontology , sediment , engineering , biology
Thick films were prepared on glass substrates coated with indium tin oxide (ITO) via electrophoretic deposition using sols that contained phenylsilsesquioxane (PhSiO 3/2 ) particles derived from phenyltriethoxysilane. The transparency of the thick PhSiO 3/2 films was significantly improved via heat treatment at temperatures >200°C. Scanning electron microscopy observation showed that the thick films changed in morphology, from aggregates of particles with several open spaces among the particles to a monolith with no open spaces after the heat treatment. Transparent films ~3 µm thick were obtained when the films were heat‐treated at a temperature of 400°C for 2 h.