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Structure of Duplex Multilayer Pb(Zr0.53Ti0.47)O3> Films Prepared by Sol‐Gel Processing
Author(s) -
Miyazawa Kun'ichi,
Ito Kunio,
Mayer Joachim,
Rühle Manfred
Publication year - 1998
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1998.tb02629.x
Subject(s) - materials science , porosity , pyrochlore , stacking , sol gel , composite material , phase (matter) , thin film , nanotechnology , chemistry , organic chemistry
Multilayer PZT films were prepared by sol‐gel processing, and their structure and composition were investigated by cross‐sectional TEM and EDX analyses. The films made by firing at 600°C (as‐deposited films) are composed of alternating porous and dense layers, and the porosity increases by a factor of 2 through heating at 750°C. The pyrochlore phase observed in the as‐deposited films turns to the perovskite phase by the heat treatment at 750°C. The Ti/Zr ratio along the film stacking direction is shown to change with the elevation of heat treatment temperature. The porous soft layers are considered to reduce the thermal stress and prevent the introduction of cracks during the firing process.