Premium
Phase Separation of Alkoxy‐derived (Ti,Sn)O 2 Oriented Thin Films
Author(s) -
Arakawa Shuichi,
Mogi Kenji,
Kikuta Koichi,
Yogo Toshinobu,
Hirano Shinichi,
Seki Yoji,
Kawamoto Mitsutoshi
Publication year - 1997
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1997.tb03204.x
Subject(s) - spinodal decomposition , sapphire , materials science , annealing (glass) , microstructure , spinodal , thin film , transmission electron microscopy , analytical chemistry (journal) , crystallography , chemical engineering , phase (matter) , composite material , nanotechnology , optics , chemistry , chromatography , laser , physics , organic chemistry , engineering
Oriented (Ti,Sn)O 2 thin films with modulated microstructure were successfully synthesized on sapphire substrates by using sol–gel processing combined with spinodal decomposition. The degree of orientation of (Ti 0.5 Sn 0.5 )O 2 thin films increased in the following order: sapphire (0001), (110), and (012). (Ti 0.5 Sn 0.5 )O 2 thin films underwent spinodal decomposition at 900°C by annealing. The variation of the 2theta value of the 202 reflection of (Ti 0.5 Sn 0.5 )O 2 films showed the typical behavior of spinodal decomposition. The rate of spinodal decomposition of the (Ti 0.5 Sn 0.5 )O 2 films on sapphire (110) was faster than that on sapphire (012) substrates. The characteristic modulated microstructure was observed for the spinodally decomposed (Ti 0.5 Sn 0.5 )O 2 films on sapphire (012) substrates by transmission electron microscopy. (Ti 0.3 Sn 0.7 )O 2 films on sapphire (012) substrates were binodally decomposed during annealing at 1300°C.