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Patterning of Lithium Niobate Thin Films Derived from Aqueous Solution
Author(s) -
Ono Satomi,
Hirano Shinichi
Publication year - 1997
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1997.tb03155.x
Subject(s) - aqueous solution , alkoxide , materials science , lithium (medication) , lithium niobate , thin film , micropatterning , lithium hydroxide , sapphire , dissolution , niobium , inorganic chemistry , stoichiometry , hydroxide , sol gel , chemical engineering , chemistry , ion exchange , nanotechnology , optics , organic chemistry , metallurgy , optoelectronics , catalysis , medicine , ion , laser , physics , engineering , endocrinology
The micropatterning of lithium niobate (LiNbO 3 ) thin films was conducted by applying a photolithographic technique to an aqueous precursor solution that was derived from a double alkoxide. The neutralization process of the alkaline lithium niobium hydroxide solution was essential to avoid the dissolution of the aluminum masking pattern on the sapphire substrate. The acetic acid was a suitable neutralizer to form the stoichiometric and transparent gel film. The gel film that was prepared from a neutralized precursor solution at pH 6.4 gave high‐quality crystalline LiNbO 3 films after heat treatment at 500°C.