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Effect of Incorporation of Nitrogen on the Structure and Dielectric Properties of Modified Oxide Sol‐Precipitated Borosilicate Glasses and Glass‐Ceramics
Author(s) -
K Jin Yong,
Hsu Richard,
Kumta Prashant N.
Publication year - 1996
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1996.tb08752.x
Subject(s) - borosilicate glass , dielectric , materials science , fourier transform infrared spectroscopy , scanning electron microscope , ceramic , oxide , chemical engineering , crystallization , analytical chemistry (journal) , mineralogy , composite material , chemistry , organic chemistry , metallurgy , engineering , optoelectronics
Glasses and glass‐ceramics have received considerable attention as substrate materials in electronic packaging because of their low (<5) dielectric constant at 1 MHz. It is also known that low molecular weight species lower the contribution to electronic polarization which is primarily responsible for changes in the dielectric constant at these frequencies. In this study, borosilicate gels have been synthesized using a modified oxide sol‐precipitation process utilizing oxide precursors. Nitridation of these gels has been initiated by combining air and ammonia heat treatments at different temperatures. The effects of incorporation of nitrogen on the structure of these gels have been studied using scanning electron microscopy (SEM) and Fourier transform infrared spectroscopy (FTIR). Similarly, the effects of nitrogen on the densification behavior of these gels have also been analyzed. At the same time, the dielectric constants of these glasses have been measured using impedance techniques. FTIR results indicate that the incorporation of nitrogen helps to decrease the borosiloxy (B‐O‐Si) bonds, causing a corresponding increase in B‐N and Si‐N bonds. Introduction of nitrogen into the gel network was seen to retard the densification kinetics and delay the crystallization onset for most of the nitrided glasses, while causing a gradual lowering of the dielectric constant.