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Microstructure of TiO 2 and ZnO Films Fabricated by the Sol‐Gel Method
Author(s) -
Ohya Yutaka,
Saiki Hisao,
Tanaka Toshimasa,
Takahashi Yasutaka
Publication year - 1996
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1996.tb08512.x
Subject(s) - materials science , microstructure , thin film , sol gel , spin coating , electrical resistivity and conductivity , doping , titanium dioxide , zinc , grain size , dip coating , titanium , coating , chemical engineering , mineralogy , composite material , nanotechnology , optoelectronics , metallurgy , chemistry , engineering , electrical engineering
Titanium dioxide and zinc oxide films were fabricated by spin‐on and dip‐coating methods. Both types of films exhibited columnar grains when the single coating was thin, ∼10 nm. The columnar TiO 2 films were dense, as confirmed by their density values calculated from the refractive index and TEM results. The addition of Al cations into the ZnO suppressed grain growth, because Zn had a lower diffusivity in the doped films. The doped ZnO films had nearly the same electrical resistivity as that of the undoped films.