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Ion Irradiation of Preceramic Polymer Thin Films
Author(s) -
Pivin Jean Claude,
Colombo Paolo,
Tonidandel Marco
Publication year - 1996
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1996.tb08021.x
Subject(s) - elastic recoil detection , materials science , rutherford backscattering spectrometry , irradiation , nanoindentation , nuclear reaction analysis , annealing (glass) , ion beam analysis , amorphous solid , thin film , ion beam , raman spectroscopy , polymer , carbon film , analytical chemistry (journal) , ceramic , ion , composite material , chemistry , nanotechnology , crystallography , optics , physics , organic chemistry , chromatography , nuclear physics
Thin films of two preceramic polymers, namely polycarbosilane (PCS) and a silicone resin (SR350), were deposited on Si substrates. Instead of employing conventional annealing at high temperatures in an inert atmosphere, ion irradiation was used to achieve the polymer‐to‐ceramic conversion. A detailed investigation of the changes in the composition, chemical structure, and hardness was performed by means of ion beam analysis (Rutherford backscattering spectrometry, nuclear reaction analysis, and elastic recoil detection analysis), FTIR, Raman and nanoindentation, respectively. This processing method yielded amorphous Si‐C and Si‐O‐C coatings possessing high hardness and density. Compared to films heat‐treated under vacuum at 1000°C, ion‐irradiated ones exhibited a similar hydrogen content, a lower oxygen contamination, and a higher carbon content. Annealing at 1000°C of previously irradiated films resulted in coatings still possessing a high carbon content and a high hardness.