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Microstructure of Strontium Titanate Thin Film Grown by the Hydrothermal‐Electrochemical Method
Author(s) -
Kajiyoshi Koji,
Hamaji Yukio,
Tomono Kunisaburo,
Kasanami Toru,
Yoshimura Masahiro
Publication year - 1996
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1996.tb07919.x
Subject(s) - materials science , strontium titanate , microstructure , crystallite , layer (electronics) , thin film , transmission electron microscopy , hydrothermal circulation , nanometre , mineralogy , composite material , substrate (aquarium) , chemical engineering , nanotechnology , metallurgy , chemistry , engineering , oceanography , geology
Microstructures of SrTiO 3 thin films grown on Ti substrates by the hydrothermal‐electrochemical method have been studied by transmission electron microscopy. The grown films consisted of a thin surface layer having an isotropic polycrystalline structure and a thick inner layer having a columnar structure. Pores of the order of several tens of nanometers were found at boundaries of columnar grains constituting the inner layer. A 20‐ or 30‐nm‐thick polycrystalline layer of Ti oxides contaminated with a small amount of Sr was also found at the SrTiO 3 film/Ti substrate interface. During the film growth at this interface, the observed pores are considered to act as short‐circuit paths for mass transport from the film surface to the interface.