Effects of Temperature and Reagent Concentration on the Morphology of Chemically Vapor Deposited β‐Ta 2 O 5 | Zendy

Bae Yong W. | Zendy; Lee Woo Y. | Zendy; Stinton David P. | Zendy

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Effects of Temperature and Reagent Concentration on the Morphology of Chemically Vapor Deposited β‐Ta 2 O 5

Author(s) -

Bae Yong W.,

Lee Woo Y.,

Stinton David P.

Publication year - 1995

Publication title -

journal of the american ceramic society

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.9

H-Index - 196

eISSN - 1551-2916

pISSN - 0002-7820

DOI - 10.1111/j.1151-2916.1995.tb08485.x

Subject(s) - morphology (biology) , materials science , chemical vapor deposition , texture (cosmology) , deposition (geology) , coating , mineralogy , reagent , atmospheric temperature range , porosity , chemical engineering , metallurgy , chemistry , composite material , nanotechnology , thermodynamics , paleontology , genetics , physics , artificial intelligence , sediment , computer science , engineering , image (mathematics) , biology

Crystalline β‐Ta 2 O 5 coatings were deposited on hot‐isostatically‐pressed Si 3 N 4 by reacting TaCl 5 with H 2 and CO 2 in the temperature range of 1000°–1300°C and at a pressure of 660 Pa. The Ta 2 O 5 coatings generally consisted of wellcoalesced 2–3 μm grains, resulting in the formation of a nonporous coating morphology. However, the presence of microcracks on the as‐deposited surface was consistently observed. The surface morphology, texture, and growth rate of the coatings were examined as a function of deposition parameters.

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