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Carbon Dioxide laser Synthesis of Ultrafine Silicon Carbide Powders from Diethoxydimethylsilane
Author(s) -
Li Yali,
Liang Yong,
Zheng Fen,
Hu Zhuangqi
Publication year - 1994
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1994.tb09773.x
Subject(s) - materials science , silicon carbide , amorphous solid , annealing (glass) , transmission electron microscopy , chemical engineering , chemical vapor deposition , amorphous carbon , carbide , carbon fibers , analytical chemistry (journal) , nanotechnology , metallurgy , composite material , crystallography , composite number , chemistry , organic chemistry , engineering
Ultrafine SiC powders have been synthesized from diethoxydimethylsilane by laser‐induced vapor‐phase reactions. The powders produced under different flow rates of the reactant vapor have been characterized by chemical analysis, transmission electron microscopy, infrared spectros‐copy, and X‐ray diffractometry. The results show that the powders are less than 30 nm in average particle diameter, uniformly distributed, spherical in shape, and amorphous. The oxygen and free carbon of the powders vary with the vapor flow rate of the reactant. Annealing of the powders at 1873 K in nitrogen for 1 h results in a complete transformation from amorphous SiC to β‐SiC and a small amount of α‐SiC.