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Effect of Antimony Addition on Electrical and Optical Properties of Tin Oxide Film
Author(s) -
Kim Kwang Ho,
Lee Soo Won,
Shin Dong Won,
Park Chan Gyung
Publication year - 1994
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1994.tb07247.x
Subject(s) - antimony , tin oxide , tin , antimony oxide , materials science , crystallinity , conductivity , electrical resistivity and conductivity , doping , chemical vapor deposition , inorganic chemistry , oxide , mineralogy , analytical chemistry (journal) , chemistry , metallurgy , nanotechnology , composite material , optoelectronics , electrical engineering , engineering , chromatography
Antimony‐doped tin oxide films were prepared on Corning glass substrate by chemical vapor deposition from a gas mixture of SnCl 4 –SbCl 5 –H 2 O. The electrical conductivity and optical transmission of tin oxide films were studied with antimony doping. The film conductivity increased largely without losing optical transparency with a small addition of antimony. The increase of the conductivity was attributed mainly to more electrons donated by pentavalent Sb ions in the SnO 2 lattice. Large additions of antimony, however, diminished the conductivity, optical transparency, and crystallinity of the film. The diminution was found to be caused by fine Sb 2 O 5 phases codeposited with SnO 2 .