Premium
Observation of Hydrogenated Amorphous Carbon Films by Atomic Force Microscopy
Author(s) -
Nakamura Yoshikazu,
Watanabe Yoshihisa,
Suefuji Yoshihito,
Hirayama Shigekazu
Publication year - 1994
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1994.tb05423.x
Subject(s) - amorphous carbon , oxygen , materials science , carbon film , amorphous solid , carbon fibers , chemical vapor deposition , surface roughness , chemical engineering , atomic force microscopy , surface finish , thin film , analytical chemistry (journal) , nanotechnology , composite material , chemistry , crystallography , environmental chemistry , organic chemistry , composite number , engineering
Atomic force microscopy images were made of the surface of CVD hydrogenated amorphous carbon films. The films were deposited from toluene vapor with oxygen additions during deposition, producing very smooth surfaces. Average roughnesses of only 0.5 nm were measured for the films made with oxygen, whereas a surface roughness of 11 nm was obtained for the films deposited without oxygen. The results suggest that sp 2 ‐ and sp 3 ‐bonded carbons were removed by oxygen rosion for CVD hydrogenated amorphous carbon films deposited in the presence of oxygen.