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Sintering and Electrical Properties of Titania‐ and Zirconia‐Containing ln 2 O 3 ‐Sno 2 (ITO) Ceramics
Author(s) -
Nadaud Nicolas,
Nanot Monique,
Boch Philippe
Publication year - 1994
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1994.tb05376.x
Subject(s) - cubic zirconia , materials science , sputtering , sintering , ceramic , deposition (geology) , chemical engineering , electrode , mineralogy , metallurgy , thin film , nanotechnology , chemistry , paleontology , sediment , engineering , biology
The deposition rate and film quality of In 2 O 3 ‐SnO 2 (ITO) transparent electrodes processed by sputtering are improved when using dense sputtering targets. Unfortunately, ITO ceramics do not sinter easily. It is shown that addition of TiO 2 (<1 wt%) to ITO greatly increases densification without degrading electrical properties of sputtered films. The influence of ZrO 2 and SiO 2 was also investigated.