Premium
Effect of Etching and Imaging Mode on the Measurement of Subsurface Damage in Microground Optical Glasses
Author(s) -
Zhou Yiyang,
Funkenbusch Paul D.,
Quesnel David J.,
Golini Donald,
Lindquist Arne
Publication year - 1994
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1994.tb04585.x
Subject(s) - etching (microfabrication) , materials science , optical microscope , characterization (materials science) , optics , isotropic etching , mineralogy , composite material , scanning electron microscope , nanotechnology , geology , physics , layer (electronics)
Microgrinding of optical glass has been under intensive study recently. Characterization of the subsurface damage (SSD) generated by this process is very important because it is one of the criteria used to characterize the quality and efficiency of the microgrinding technique. SEM, as a new method, is applied for a detailed observation of the SSD. Etching with HF solutions of various concentrations is utilized to open the subsurface cracks. The etching condition has a significant influence on the measured SSD value. Using the SEM method, slightly larger SSD values are obtained compared to those obtained using conventional optical microscopy.