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Characterization of PLZT Films Deposited by Spray Pyrolysis
Author(s) -
Delikouras Evangelos A.,
Perlmutter Daniel D.
Publication year - 1994
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1994.tb04562.x
Subject(s) - materials science , scanning electron microscope , microanalysis , pyrolysis , spray pyrolysis , ceramic , chemical engineering , aqueous solution , silicon , diffraction , thin film , characterization (materials science) , homogeneity (statistics) , magnesium , mineralogy , analytical chemistry (journal) , composite material , nanotechnology , optics , metallurgy , chemistry , organic chemistry , engineering , physics , statistics , mathematics
Spray pyrolysis was used to prepare films of PLZT ceramics, a class of electrooptic materials that find applications in integrated optics devices. The films were prepared by spraying an aqueous solution of mainly nitrate salts of the desired cations onto oriented silicon and magnesia substrates. After drying, the solid deposit was thermally decomposed to yield the mixture of the desired oxides. The surface morphology of the prepared thin films was examined by optical and scanning electron microscopy and the presence of crystalline phases was identified by X‐ray powder diffraction. Compositional homogeneity was determined by energy‐dispersive X‐ray microanalysis.