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Sol—Gel Fabrication of Pb(Zr 0.52 Ti 0.48 )O 3 Thin Films Using Lead Acetylacetonate as the Lead Source
Author(s) -
Selvaraj Ulagaraj,
Brooks Keith,
Prasadarao Alamanda V.,
Komarneni Sridhar,
Roy Rustum,
Cross L. Eric
Publication year - 1993
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1993.tb03923.x
Subject(s) - materials science , lead titanate , zirconium , dielectric , phase boundary , ferroelectricity , thin film , sol gel , spin coating , coercivity , titanium , microstructure , analytical chemistry (journal) , perovskite (structure) , phase (matter) , mineralogy , chemical engineering , nanotechnology , metallurgy , chemistry , physics , optoelectronics , organic chemistry , condensed matter physics , chromatography , engineering
Lead zirconium titanate (PZT) thin films of the morphotropic phase boundary composition [Pb(Zr 0.52 Ti 0.43 )O 3 ] were deposited on platinum‐coated silicon by a modified sol‐gel process using lead acetylacetonate as the lead source. The precursor solution for spin coating was prepared from lead acetylacetonate, zirconium n ‐butoxide, and titanium isopropoxide. The use of lead acetylacetonate instead of the widely used lead acetate trihydrate provided more stability to the PZT precursor solution. Films annealed at 700°C for 12 min formed well‐crystallized perovskite phase of Pb(Zr 0.52 Ti 0.48 )O 3 . Microstructures of these films indicated the presence of submicrometer grains (0.1 to 0.2 μm). The dielectric constant and loss values of these films measured at 10 kHz were approximately 1200 and 0.04, respectively, while the remanent polarization and coercive field were ∼ 13 μC/cm 2 and ∼ 35 kV/cm. Aging of the solution had almost no effect on the dielectric and ferroelectric properties of these films.