Premium
Synthesis of a Polyborosilazane and Its Conversion into Inorganic Compounds
Author(s) -
Funayama Osamu,
Kato Tomohiro,
Tashiro Yuji,
Isoda Takeshi
Publication year - 1993
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1993.tb03665.x
Subject(s) - anhydrous , amorphous solid , pyrolysis , crystallization , materials science , silicon nitride , polymer , ammonia , infrared spectroscopy , ceramic , nitride , yield (engineering) , silicon , boron nitride , chemical engineering , inorganic chemistry , chemistry , organic chemistry , nanotechnology , metallurgy , composite material , layer (electronics) , engineering
A novel polyborosilazane was synthesized by reacting per‐hydropolysilazane with trimethyl borate. The chemical structure of this polymer was investigated by the techniques of infrared spectroscopy and nuclear magnetic resonance measurements. Amorphous silicon nitride was obtained by pyrolysis of this polymer in a stream of anhydrous ammonia to 1000°C with high ceramic yield. The pyrolysis product remained amorphous after additional heating to 1700°C under N 2 . Crystallization to α‐Si 3 N 4 and β‐Si 3 N 4 proceeded with heat treatment at 1800°C under N 2 . These results indicate that polyborosilazane is a good precursor for amorphous silicon nitride based materials.