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Determination of Young's Modulus of Thin Films
Author(s) -
Maddalena Amedeo
Publication year - 1992
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1992.tb05533.x
Subject(s) - modulus , materials science , cantilever , thin film , young's modulus , substrate (aquarium) , composite material , vibration , coating , beam (structure) , optics , acoustics , physics , nanotechnology , oceanography , geology
An improved vibrating‐reed method is described for determining Young's modulus of thin films deposited on both sides of a substrate. This technique consists of measuring the resonant frequency of a cantilever composite beam obtained by coating both sides of a substrate. The calculation procedure is presented to evaluate the film modulus from sample geometry, material density, and mechanical resonant frequency. For accurate determination of resonant frequency, the phase angle between the exciting and vibration signals is analyzed. Using the proposed technique, Young's modulus of ZrO 2 thin films is calculated, obtaining a value in agreement with literature data.