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Thermodynamics of the Y‐Ba‐Cu‐C‐O‐H System: Application to the Organometallic Chemical Vapor Deposition of the YBa 2 Cu 3 O 7− x Phase
Author(s) -
Vahlas Constantin,
Besmann Theodore M.
Publication year - 1992
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1992.tb05488.x
Subject(s) - chemical vapor deposition , phase diagram , group 2 organometallic chemistry , gibbs free energy , deposition (geology) , chemistry , chemical composition , thermodynamics , phase (matter) , molecule , physics , biology , paleontology , organic chemistry , sediment
A calculational thermodynamic investigation of the chemical vapor deposition (CVD) of YBa 2 Cu 3 O 7− x from organometallic precursors has been performed, based on the minimization of the Gibbs energy of the Y‐Ba‐Cu‐C‐O‐H chemical system. Thermodynamic data for the participating compounds were selected after a critical assessment of the available thermochemical information and are self‐consistent with an accepted phase diagram. The results are presented in CVD diagrams which illustrate the influence of the most commonly used operating conditions of temperature, pressure, and initial gas composition on the formation of stable phases.