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Reactive Laser Ablation Synthesis of Nanosize Aluminum Nitride
Author(s) -
Johnston Gregory P.,
Muenchausen Ross E.,
Smith Douglas M.,
Foltyn Steve R.
Publication year - 1992
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1992.tb04451.x
Subject(s) - materials science , nitride , differential thermal analysis , calcination , aluminium , laser ablation , nitrogen , nitriding , analytical chemistry (journal) , fluence , laser , chemical engineering , metallurgy , diffraction , nanotechnology , chemistry , layer (electronics) , biochemistry , physics , organic chemistry , engineering , chromatography , optics , catalysis
An aluminum (Al) target was laser ablated in a nitrogen (N 2 ) atmosphere, producing aluminum nitride (AlN) powder. These powders were calcined at 900°C for 2 h. Powders were produced at various nitrogen pressures, and the calcined powders were tested for unreacted aluminum content, using differential thermal analysis (DTA). The AlN powder, produced at a laser fluence of 12 J/cm 2 and a nitrogen pressure of 10.0 kPa (75 torr), showed no evidence of unreacted aluminum by DTA and was phase‐pure AlN by X‐ray diffraction (XRD). The surface area of this powder is 82 m 2 /g, corresponding to a particle size of ∼11 nm, which is in good agreement with TEM observations.