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In Situ Growth of Superconducting Yba 2 Cu 3 O 7‐x Thin Films
Author(s) -
Haung ChorngJye,
Chang ChihYu,
Chen MaoChieh,
Tseng TseungYuen
Publication year - 1991
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1991.tb08302.x
Subject(s) - flatness (cosmology) , materials science , in situ , atmospheric temperature range , superconductivity , high temperature superconductivity , substrate (aquarium) , sputtering , sputter deposition , analytical chemistry (journal) , thin film , condensed matter physics , optoelectronics , chemistry , nanotechnology , thermodynamics , physics , oceanography , organic chemistry , cosmology , chromatography , quantum mechanics , geology
Using single‐target on‐axis sputter deposition, Y Ba 2 Cu 3 O 7‐x films, with flatness oriented in the c axis and a zero‐resistance temperature ( Tco ) of 89 K, were prepared by an in situ growth technique. This work examines the effect of the growth temperature on the properties of in situ films. The experimental results show that high‐quality YBa 2 Cu 3 O 7‐x films can be obtained by controlling the substrate temperature in a range from 680 o to 690 o C. In addition, a new parallel‐circuit model is proposed and a simulation of the resistance versus temperature curve is presented.