Premium
Preparation of Dispersed Phase Ceramic Boron Nitride and Aluminum Nitride Composite Coatings by Chemical Vapor Deposition
Author(s) -
Lee Woo Y.,
Lackey W. J.,
Freeman Garth B.,
Agrawal Pradeep K.,
Twait D. J.
Publication year - 1991
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1991.tb08272.x
Subject(s) - boron nitride , materials science , chemical vapor deposition , composite number , ceramic , whiskers , nitride , amorphous solid , reagent , deposition (geology) , phase (matter) , aluminium , ceramic matrix composite , coating , boron , chemical engineering , composite material , nanotechnology , layer (electronics) , chemistry , crystallography , paleontology , engineering , biology , organic chemistry , sediment
Dispersed phase ceramic composite coatings containing BN and AIN were prepared by chemical vapor deposition. The BN + AIN coatings were deposited on Al 2 O 3 from the BCI 3 –AICI 3 ‐NH 3 reagent system in the temperature range of 700° to 1200°C. Also, single‐phase BN and AIN coatings were prepared for comparison purposes. The composite coatings consisted of very small BN and AIN regions which were either crystalline or amorphous, depending on deposition temperature and reagent concentrations. For example, a composite containing AlN whiskers of less than 100‐nm diameter in a matrix of turbostratic BN of 2‐nm grain size was deposited at 1100°C and 20 kPa.