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Polymeric Cyanoborane, (CNBH 2 ) n : Single Source for Chemical Vapor Deposition of Boron Nitride Films
Author(s) -
Maya Leon,
Richards Hugh L.
Publication year - 1991
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1991.tb06895.x
Subject(s) - chemical vapor deposition , boron nitride , boron , materials science , stoichiometry , amorphous solid , boron trichloride , carbon fibers , inorganic chemistry , nitride , silicon nitride , hydrogen , chemical engineering , nitrogen , silicon , chemistry , nanotechnology , metallurgy , composite number , organic chemistry , composite material , layer (electronics) , engineering
Polymeric cyanoborane, (CNBH 2 ) n , is a material readily prepared by passing hydrogen chloride through an ether suspension of sodium cyanotrihydroborate. This polymeric material was volatilized in a CVD reactor to produce, at 600°C, amorphous films containing boron, nitrogen, and carbon. Residual carbon present in the films was removed by ammonia treatment at 800°C, producing nearly stoichiometric boron nitride films that were adherent to a variety of substrates including silicon.