Premium
Fracture Toughness of Chemically Vapor‐Deposited Diamond
Author(s) -
Drory Michael D.,
Gardinier Clayton F.,
Speck James S.
Publication year - 1991
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1991.tb04317.x
Subject(s) - indentation , fracture toughness , materials science , diamond , indentation hardness , chemical vapor deposition , composite material , vickers hardness test , microstructure , nanotechnology
The fracture toughness of chemically vapor‐deposited diamond is estimated by a Vickers indentation method. Freestanding diamond films of 400‐μm thickness are produced with plasma‐enhanced chemical vapor deposition and highly polished for indentation testing. Indentation testing was performed with a microhardness tester using a load range of 5 to 8 N. The average fracture toughness is estimated as 5.3 ± 1.3 MPA · m 1/2 .