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Preparation of Strontium Titanate Thin Film on Titanium Metal Substrate by Hydrothermal‐Electrochemical Method
Author(s) -
Yoo Seung Eul,
Hayashi Motoo,
Ishizawa Nobuo,
Yoshimura Masahiro
Publication year - 1990
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1990.tb07637.x
Subject(s) - materials science , hydrothermal circulation , strontium titanate , crystallite , titanium , dielectric , thin film , electrochemistry , chemical engineering , metal , titanate , electrolyte , substrate (aquarium) , mineralogy , nanotechnology , composite material , metallurgy , ceramic , electrode , chemistry , optoelectronics , oceanography , geology , engineering
Polycrystalline SrTiO 3 thin films have been prepared on Timetal substrates by the hydrothermal‐electrochemical method. The films were prepared at temperatures ranging from 100° to 200°C and under saturated vapor pressures in electrolytic solutions of 1 N to 5 N Sr(OH) 2 . A galvanostat was used to apply a direct current of 5 to 25 mA/cm 2 . The films had smooth and homogeneous surfaces without any visible pores or defects. The dielectric constant of the films was approximately 129 assuming 25 nm for film thickness.