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Nitridation of the Sol–Gel‐Derived Titanium Oxide Films by Heating in Ammonia Gas
Author(s) -
Kamiya Kanichi,
Nishijima Tomoaki,
Tanaka Katsuhisa
Publication year - 1990
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1990.tb06758.x
Subject(s) - diethanolamine , materials science , nitriding , titanium , sol gel , tin , titanium nitride , ammonia , reagent , chemical engineering , substrate (aquarium) , nitride , inorganic chemistry , titanium oxide , metallurgy , chemistry , layer (electronics) , composite material , nanotechnology , organic chemistry , oceanography , geology , engineering
Dip‐coated sol–gel‐derived TiO 2 films on an alumina substrate were converted to nonstoichiometric titanium nitride (TiN x ( x ≦ 1)) films by heating at approxmately 1000°C in NH 3 gas. TiO 2 films made from TiO 2 sols prepared from Ti(O– i ‐C 3 H 7 ) 4 and stabilized by diethanolamine were more easily nitrided than those from sols containing HCl as a deflocculant reagent. This appears to be a result of the more porous structure of the former films.