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Etching Alumina with Molten Vanadium Pentoxide
Author(s) -
Katz Joel D.,
Hurley George
Publication year - 1990
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1990.tb05292.x
Subject(s) - pentoxide , vanadium , etching (microfabrication) , materials science , boiling , phosphoric acid , microstructure , niobium pentoxide , isotropic etching , metallurgy , chemical engineering , niobium , composite material , chemistry , organic chemistry , layer (electronics) , engineering
A method for etching alumina using molten vanadium pentoxide at 750°C for up to 1 min is discussed. Microstructures of 95% dense alumina etched by this technique, boiling phosphoric acid, and ion and thermal etching are compared.