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Reaction Sintering of Submicrometer Silicon Powder
Author(s) -
Gregory Otto J.,
Lee SangBaek,
Flagan Richard C.
Publication year - 1987
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1987.tb04964.x
Subject(s) - sintering , materials science , silicon , nitriding , chemical engineering , metallurgy , microstructure , permeability (electromagnetism) , composite material , chemistry , layer (electronics) , biochemistry , membrane , engineering
Submicrometer silicon powder synthesized by thermally induced, vapor‐phase reaction in an aerosol reactor was densified by reaction sintering to form Si 3 N 4 . The densification behavior of these spherical, nonagglomerated particles in the 0.1 to 0.2 μm size range is described. Competition between densification by silicon sintering and reaction product infilling was observed at typical reaction sintering temperatures. In addition, pore growth during the early stages of silicon presintering adversely affected nitrogen permeability and nitriding rates. The factors influencing the nitridation of ultrafine silicon powders are discussed.