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Crystal Structure of Silicon Powders Produced from Laser‐Heated Silane
Author(s) -
Marras Robert A.,
Haggerrty John S.
Publication year - 1987
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1987.tb04861.x
Subject(s) - crystallinity , materials science , crystallization , amorphous solid , crystalline silicon , silane , silicon , annealing (glass) , chemical engineering , amorphous silicon , microstructure , crystal (programming language) , nanocrystalline silicon , mineralogy , crystallography , composite material , metallurgy , chemistry , programming language , computer science , engineering
The crystallinity and microstructure of fine silicon particles produced by the decomposition of laser‐heated silane gas were studied in as‐synthesized and annealed states. Amorphous, partially crystalline, and fully crystalline particles can be produced. With annealing at 550°C, partially crystalline particles become fully crystalline; amorphous particles remain amorphous. The results agree with previous interpretations of formation, growth, and crystallization processes in the reaction zone based on light scattering and transmission diagnostics.