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Suppression of Insulator Charging During Secondary‐Ion Mass Spectroscopy and Scanning Electron Microscopy
Author(s) -
Giraldez Emilio,
Dolhert Leonard,
David Kingery W.,
Petuskey William T.
Publication year - 1985
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1985.tb11535.x
Subject(s) - scanning electron microscope , electron beam induced deposition , secondary ion mass spectrometry , secondary electrons , analytical chemistry (journal) , ion , spectroscopy , materials science , mass spectrometry , energy dispersive x ray spectroscopy , ion beam , focused ion beam , electron , energy filtered transmission electron microscopy , secondary ion mass spectroscopy , cathode ray , chemistry , atomic physics , optoelectronics , scanning transmission electron microscopy , physics , organic chemistry , chromatography , quantum mechanics , silicon , composite material
Work with a hot stage capable of temperatures of up to 1200°C has shown that charging of insulating materials in a scanning electron microscope can be completely eliminated by heating the sample to several hundred degrees centigrade. A similar scheme was devised to eliminate charging in a secondary‐ion mass spectrometer in order to study oxygen‐18 concentration profiles in MgO. Before and during analysis the sample surface was exposed to a high‐energy electron beam. The mechanism responsible for the elimination of spurious charging is related to surface heating by the electron beam.