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Sphere‐on‐Tape Method of Rapid Selected‐Area Thinning of Samples for Transmission Electron Microscopy
Author(s) -
Groenou Arnold Broese,
Oers Déanis J. C.
Publication year - 1983
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1983.tb11013.x
Subject(s) - transmission electron microscopy , materials science , thinning , ferrite (magnet) , scanning electron microscope , ion milling machine , instrumentation (computer programming) , electron microscope , optics , magnetic tape , micrograph , analytical chemistry (journal) , composite material , chemistry , nanotechnology , chromatography , physics , acoustics , tape recorder , layer (electronics) , computer science , ecology , biology , operating system
By using an instrumentation recorder with Al 2 O 3 tape loaded on the reverse side with an Al 2 O 3 sphere 4 mm in diameter, flat samples were thinned locally to a thickness of 10 μm. About 90 min is required for two‐sided thinning of a ferrite sample 200 μm thick, followed by 30 h of ion‐milling. Transmission electron micrographs showing details of glass gaps in magnetic recording heads were obtained. The method is also thought to be useful for making thin cross sections of complicated structures .