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A Liquid Silazane Precursor To Silicon Nitride
Author(s) -
Seyferth Dietmar,
Wiseman Gary H.,
Prud'homme Christian
Publication year - 1983
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1983.tb09979.x
Subject(s) - yield (engineering) , dichlorosilane , pyrolysis , silicon nitride , nitrogen , diethyl ether , silicon , hydrogen , materials science , ceramic , dichloromethane , chemistry , chemical engineering , organic chemistry , metallurgy , solvent , engineering
The reaction of dichlorosilane, H 2 SiCl 2 , with gaseous NH 3 in dichloromethane or diethyl ether solution results in the formation of a silazane oil containing silicon, hydrogen, and nitrogen in good yield. This ammonolysis product can be pyrolyzed in an N 2 atmosphere (temperature to 1150°C) to give α‐Si 3 N 4 in ∼70% yield. The ceramic product formed has a relatively porous, fine‐grained microstructure with some cracks and blisters.