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Thermodynamics of Silicon Nitridation: Effect of Hydrogen
Author(s) -
Shaw N.J.,
Zeleznk F.J.
Publication year - 1982
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1982.tb10790.x
Subject(s) - silicon , gibbs free energy , hydrogen , thermodynamics , non equilibrium thermodynamics , materials science , chemistry , metallurgy , physics , organic chemistry
The effects of hydrogen on the equilibrium concentration of species formed during nitridation of silicon were studied using a computer program that calculates equilibrium compositions by minimizing the Gibbs free energy.