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Ion Beam Effects on Glass Surfaces
Author(s) -
Smets B. M. J.,
Lommen T. P. A.
Publication year - 1982
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1982.tb10453.x
Subject(s) - sputtering , collision cascade , x ray photoelectron spectroscopy , ion , yield (engineering) , atomic physics , ion beam , materials science , binding energy , cascade , beam (structure) , analytical chemistry (journal) , molecular physics , chemistry , chemical physics , thin film , optics , nanotechnology , nuclear magnetic resonance , physics , composite material , organic chemistry , chromatography
X‐ray photoelectron spectroscopy has been used to show that 4 keV Ar + bombardment of glass results in a drastic alteration of the sample surface. Field‐induced migration of sodium ions and preferential sputtering account for these changes. The sputter yield is directly related to the binding energy of the ejected particles, in accordance with the linear collision cascade theory.