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Thermal Decomposition of the Oxynitride of Silicon
Author(s) -
EHLERT THOMAS C.,
DEAN T. P.,
BILLY M.,
LABBE J.C.
Publication year - 1980
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1980.tb10707.x
Subject(s) - silicon oxynitride , library science , chemistry , silicon , computer science , silicon nitride , organic chemistry